2023 年 66 巻 8 号 p. 448-454
Plasmas or discharge are often generated using noble gases and applied to various fields such as surface treatments of materials and biological fields. The behavior of electrons and ions (swarm parameters) help to understand the plasmas and discharges. Swarm parameters are often acquired at low pressure. Recently, plasmas generated at atmospheric pressure have applied in many fields. To acquire the swarm parameters at atmospheric pressure, this paper proposes new measurement method for electron drift velocity and effective ionization rate coefficient. First, these parameters are acquired in nitrogen gas at atmospheric pressure. Second, they are acquired in mixed gas (synthetic air was mixed with argon gas). These results are compared with the results of BOLSIG＋ simulation. We conclude that the new measurement method is useful in gases without negative ions ; even in gases with negative ions of oxygen, this method are valid at reduced electric field E/N ≦ 31.6×10－21 Vm2.
