Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Special Feature : The Latest Trend of Dry Vacuum Pumps
Role of Dry Vacuum Pumps as a Backing Pump of Turbomolecular Pumps
Tomoo OTA
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Keywords: turbomolecular pump, dry vacuum pump, pumping performance, ultimate pressure
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2024 Volume 67 Issue 4 Pages 182-185

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Abstract

The operating pressure of a turbomolecular pump is several hundred Pa or less due to its pumping principle. Therefore, a dry vacuum pump is essential as a backing pump to achieve an oil-free environment. This report explains how dry vacuum pumps affect the pumping performance and reliability of turbomolecular pumps.

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この記事はクリエイティブ・コモンズ [表示 - 非営利 4.0 国際]ライセンスの下に提供されています。
https://creativecommons.org/licenses/by-nc/4.0/deed.ja
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