The purpose of this study is to improve ceramic coatings having a high stable electrostatic adsorption force. The use of the coating is for the Johnsen-Rahbek force type electrostatic chucks used to fix silicon wafers inside vacuum chambers for processes such as Etch, CVD and PVD for semiconductor manufacturers. Previously the authors developed a dielectric substance ceramic coating for electrostatic chucks using Atmospheric Plasma Spraying (APS). This ceramic coating was not suitable because of its unstable electrostatic adsorption force. In a subsequent study, Vacuum Plasma Sprayed (VPS) Al2O3-7.5mass%TiO2 coating was investigated. As a result, it was found that the VPS coating has stable electrical resistivity and adsorption force. The dielectric constant of VPS Al2O3-TiO2 coating was sufficient for application to electrostatic chuck. On the other hand, it was suggested from results with respect to residual adsorption force and duration time after power off that the residual adsorption characteristic was not adequate.
Boronizing is a thermo-chemical surface treatment in which boron atoms are diffused into the surface of a work piece to form borides with the base material. When applied to the metallic materials, boronizing provides wear and abrasion resistance comparable to sintered carbides. However conventional boronizing is carried out at temperatures ranging from 800°C to 1050°C and takes from one to several hours. The structure and properties of the base material is influenced considerably by the high temperature and long treatment time. In order to avoid these drawbacks of conventional boronizing, laser-assisted boronizing is investigated which activates the conventional boronizing material and the work piece with a high density laser power. In this study, effect of laser characteristics was examined on the laser boronizing of stainless steel. After laser boronizing, the microstructure of the boride layer was analyzed with an optical microscope, electron probe micro analyser(EPMA) and X-ray diffractometer (XRD). The mechanical properties of borided layer were evaluated using Vickers hardness tester and sand erosion tester. Results showed that the boride layer was composed of NiB, CrB, FeB and Fe2B, and get wear resistance.
Technology of periodic microstructures formation on plastic plate, the polyethylene terephthalate (PET) plate, was developed with an aerosol beam. The beam was composed of submicron-size anatase titania (TiO2) particles. Formation mechanism depended on an incident angle of the beam to the PET plate. At an incident angles in the range of 0 to 30°C, a TiO2 films were fabricated on the PET plate. Deposition rate of the film decreased as incident angle increased in the range of 0 to 30°C. The film was not produced at 40°C. At 50 and 60°C, the PET plate was etched by the beam irradiation. In the etching area, periodic microstructures were self-organized, whose grooves’ direction was perpendicular to the beam incidence direction.