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Investigation and Countermeasure of Abnormal Increase in Parasitic resistance of Linear Region of SOI NMOS of Minimal Fab

Takeshi Hamamoto, Kazushige Sato, Sommawan Khumpuang, Shiro Hara

Session ID: 24a-E103-1
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2301

CONFERENCE PROCEEDINGS FREE ACCESS

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Evaluation of contact resistance fabricated by minimal Fab

Masashi Kase, Shuichi Noda, Khumpuang Sommawan, Hara Shiro

Session ID: 24a-E103-2
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2302

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Evaluation of Variation in Sheet Resistance of nMOSFET using Minimal-Fab Spin-on Dopant Process

Shuhei Nakamichi, Hiroshige Kogayu, Noriko Miura, Hiroyuki Tanaka, Fum ...

Session ID: 24a-E103-3
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2303

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Development of process technology for diamond device using Minimal fab

Hideyuki Watanabe, Kazumasa Nemoto, Fumito Imura, Noriko Miura, Takash ...

Session ID: 24a-E103-4
Published: February 25, 2022
Released on J-STAGE: April 25, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2304

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Study of interval time effect to exchange gases in Bosch Process

Hiroyuki Tanaka, Sang-Seok Lee, Yoshiyuki Nozawa, Toshihiro Hayami, So ...

Session ID: 24a-E103-5
Published: February 25, 2022
Released on J-STAGE: April 25, 2023

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2305

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Study of two-axes Piezo-resistive Accelerometer using Full Minimal-Fab Process

Hiroshige Kogayu, Hiroyuki Tanaka, Fumito Imura, Sommawan Khumpuang, S ...

Session ID: 24a-E103-6
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2306

CONFERENCE PROCEEDINGS FREE ACCESS

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Individualization technology of Half-inch wafer

Takashi Yajima, Fumito Imura, Sommawan Khumpuang, Shiro Hara

Session ID: 24a-E103-7
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2307

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Investigation of 3D ICs (Integrated Circuits) Fabricated by Minimal Fab

Fumito Imura, Hiroyuki Tanaka, Kouji Oosawa, Takurou Kouno, Kenzo Shod ...

Session ID: 24a-E103-8
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2308

CONFERENCE PROCEEDINGS FREE ACCESS

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Development of Process for Through Silicon Vias (TSVs) Fabricated by Minimal Fab

Fumito Imura, Hiroyuki Tanaka, Kouji Oosawa, Takurou Kouno, Kenzo Shod ...

Session ID: 24a-E103-9
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2309

CONFERENCE PROCEEDINGS FREE ACCESS

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Development of TSV Electroplating Process using Minimal TSV Electroplating Tool

Kayo Kamasaki, Shinji Iseki, Fumito Imura, Hiroyuki Tanaka, Kouji Oosa ...

Session ID: 24a-E103-10
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2310

CONFERENCE PROCEEDINGS FREE ACCESS

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Temperature Compensation in Minimal Laser Heating Furnace(Ⅱ)

kazushige sato, Takashi Chiba, Masao Terada, Kengo Hamada, Sommawan Kh ...

Session ID: 24a-E103-11
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2311

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Development of spin-droplet cleaning technology that enables wafer backside cleaning

Kazumasa Nemoto, Takashi Yajima, Sommawan Khumpuang, Shiro Hara

Session ID: 24a-E103-12
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2312

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Study of Multilayer Wiring Process using Minimal Water Plasma Ashing

Noriko Miura, Masashi Kase, Takeshi Aizawa, Mitsunori Nogawa, Yasuhiro ...

Session ID: 24a-E103-13
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2313

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Study on generation technology of ultra-high power atmospheric pressure thermal plasma jet

Kenshiro Horiuchi, Takuma Sato, Hiroaki Hanafusa, Seiichirou Higashi

Session ID: 24p-E103-1
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2314

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Development of automatic 3D temperature imaging technique for SiC wafer during ultra-rapid thermal annealing based on optical-interference contactless thermometry (OICT)

Jiawen Yu, Keiya Fujimoto, Kotaro Matsuguchi, Takuma Sato, Hiroaki Han ...

Session ID: 24p-E103-2
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2315

CONFERENCE PROCEEDINGS FREE ACCESS

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Operand Measurement Using the Laboratory based Hard X-ray Photoelectron Spectroscopy with Bias Application

Tappei Nishihara, Masatake Machida, Atsushi Ogura

Session ID: 24p-E103-3
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2316

CONFERENCE PROCEEDINGS FREE ACCESS

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Study on Photoluminescence Properties of Fe-silicide-NDs

Hiroshi Furuhata, Haruto Saito, Katsunori Makihara, Akio Ohta, Noriyuk ...

Session ID: 24p-E103-4
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2317

CONFERENCE PROCEEDINGS FREE ACCESS

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Ge cyclic dry etching using HI/O₂ plasma treatments at room temperature

Hiroto Ishii, Wen Hsin Chang, Hiroyuki Ishii, Mengnan Ke, Tatsuro Maed ...

Session ID: 24p-E103-5
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2318

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Formation of Phosphorus Doped N-type Silicon Thin Film Using Sputter Epitaxy

Hiroya Esaki, Nobumitsu Hirose, Akifumi Kasamatsu, Toshiaki Matsui, Yo ...

Session ID: 24p-E103-6
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2319

CONFERENCE PROCEEDINGS FREE ACCESS

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Grain Size Control of Poly-Si Thin Films Crystallized by Excimer Laser Annealing with Intensity Distribution, and Electrical Properties of the Poly-Si TFTs

Toru Okatsugi, Nagano Takahiro, Kurashige Takayuki, Katayama Keita, Ka ...

Session ID: 24p-E103-7
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2320

CONFERENCE PROCEEDINGS FREE ACCESS

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Partial depletion SOI transistor using low temperature sputter SiO₂ gate insulator

Masato Ooya, Wenchang Yeh, Yusaku Magari

Session ID: 24p-E103-8
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2321

CONFERENCE PROCEEDINGS FREE ACCESS

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Effect of As irradiation on the surface roughness of Si thin films grown on CaF₂

Masataka Saito, Gensai Tei, Liu Long, Yohei Koyanagi, Daiki Sugawara, ...

Session ID: 24p-E103-9
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2322

CONFERENCE PROCEEDINGS FREE ACCESS

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Experimental Considerations for Integration Method of Si Thin-Film Microchips Fluidic Self-Assembly

Yutaka Fujita, Shoji Ishihara, Katsuaki Tanabe

Session ID: 24p-E103-10
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2323

CONFERENCE PROCEEDINGS FREE ACCESS

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Mo contact to the laser-crystallized (100)-oriented grain-boundary free Si film

Nobuo Sasaki, Satoshi Takayama, Yukiharu Uraoka

Session ID: 24p-E103-11
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2324

CONFERENCE PROCEEDINGS FREE ACCESS

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Low Temperature Fabrication of Metal/GeSn Contacts for Opt-Electronics Applications

Noboru Shimizu, Yi Wang, Keisuke Yamamoto, Shiyu Zhang, Osamu Nakatsuk ...

Session ID: 24p-E103-12
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2325

CONFERENCE PROCEEDINGS FREE ACCESS

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Characteristic Analysis of poly-Si TFTs with Ti Source/Drain Structure using Device Simulator

Yuki Sawama, Tatsuya Okada

Session ID: 24p-E103-13
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2326

CONFERENCE PROCEEDINGS FREE ACCESS

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Crystallization of a-Si Films deposited by RF Sputtering using Blue Direct Diode Laser (Part2)

Mitsuoki Hishida, Kentaro Miyano, Naohiko Kobata, Masaki Nobuoka, Taka ...

Session ID: 24p-E103-14
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2327

CONFERENCE PROCEEDINGS FREE ACCESS

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Crystallization by Rapid Thermal Annealing of Sputtered InSb Films Deposited on Glass Using Ne

Otokichi Shimoda, Charith Jayanada Koswaththage, Takashi Noguchi, Taka ...

Session ID: 24p-E103-15
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2328

CONFERENCE PROCEEDINGS FREE ACCESS

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Raman spectroscopy of the ion-implanted CW laser crystallized Si thin films

Satoshi Takayama, Sasaki Nobuo, Uraoka Yukiharu

Session ID: 24p-E103-16
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2329

CONFERENCE PROCEEDINGS FREE ACCESS

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Performance of n-ch and p-ch Cu-MIC self-aligned DG poly-Ge TFTs on glass substrates

Sho Suzuki, Keigo Tomizuka, Akito Hara

Session ID: 24p-E103-17
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2330

CONFERENCE PROCEEDINGS FREE ACCESS

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Cross-sectional shape effect of mechanical properties of micro-cantilevers made of Au single crystal

Ryohei Hori, Kazuya Fujita, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki ...

Session ID: 25a-E103-1
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2331

CONFERENCE PROCEEDINGS FREE ACCESS

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Micro-Mechanical Property Evaluation of Gold-Nickel Alloys Toward Design of MEMS Components

Takumi Akiyama, Yu-An Chien, Chun-Yi Chen, Tso Fu Mark Chang, Daisuke ...

Session ID: 25a-E103-2
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2332

CONFERENCE PROCEEDINGS FREE ACCESS

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A Study on High-Sensitivity MEMS Sensor Module for Micro Muscle Sound Measurement

Akira Onishi, Kohei Shibata, Akihiro Uchiyama, Katsuyuki Machida, Taik ...

Session ID: 25a-E103-3
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2333

CONFERENCE PROCEEDINGS FREE ACCESS

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Evaluation of Device for High-Sensitivity MEMS Sensor Module

Akihiro Uchiyama, Kohei Shibata, Akira Onishi, Katsuyuki Machida, Taik ...

Session ID: 25a-E103-4
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2334

CONFERENCE PROCEEDINGS FREE ACCESS

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Dog Breath Analysis Using a Micropreconcentrator

Shinji Taga, Tadao Matsunaga, Takao Amaha, Yusuke Murahata, Yoshiharu ...

Session ID: 25a-E103-5
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2335

CONFERENCE PROCEEDINGS FREE ACCESS

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A Study of MEMS Vibration Energy Harvesters with Self-Assembled Electrets

Reiki Sugimoto, Kosuke Kawashima, Hideyuki Kayaguchi, Hisao Ishii, Yuy ...

Session ID: 25a-E103-6
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2336

CONFERENCE PROCEEDINGS FREE ACCESS

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Trial on Microfabrication of Plastic Optical Fibers for Sensing Applications

Yuki Hori, Heeyoung Lee, Yosuke Mizuno, Daisuke Yamane

Session ID: 25a-E103-7
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2337

CONFERENCE PROCEEDINGS FREE ACCESS

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A Non-Contact Out-of-Plane Vibratory Energy Harvester with an Electric Double Layer Electret

Keigo Nota, Kentaro Tamura, Kazumoto Miwa, Shimpei Ono, Daisuke Yamane

Session ID: 25a-E103-8
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2338

CONFERENCE PROCEEDINGS FREE ACCESS

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Evaluation of Transferred FDSOI Transistors and Logic Circuits for Flexible CMOS Image Sensors

Masahide Goto, Shigeyuki Imura

Session ID: 25a-E103-9
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2339

CONFERENCE PROCEEDINGS FREE ACCESS

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Single-electron tunneling in Si nano-transistors co-doped at high concentration

Tsutomu Kaneko, Taruna Teja Jupalli, Shumpei Miura, Kensuke Yamaguchi, ...

Session ID: 23a-E307-1
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2340

CONFERENCE PROCEEDINGS FREE ACCESS

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Study of single-electron tunneling in Si nano-transistors in different doping concentration regimes for room-temperature operation

Jupalli Taruna Teja, Ananta Debnath, Yukinori Ono, Daniel Moraru

Session ID: 23a-E307-2
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2341

CONFERENCE PROCEEDINGS FREE ACCESS

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Single Electron Transport with Single Minimum Surface Acoustic Wave

Shunsuke Ota, Junliangn Wang, Hermann Edlbauer, Baptiste Jadot, Pierre ...

Session ID: 23a-E307-3
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2342

CONFERENCE PROCEEDINGS FREE ACCESS

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Stabilizing method of a double quantum dot towards long-term and stable spin-qubit operation

Sayyid Irsyadul Ibad, Hiroki Takahashi, Shimpei Nishiyama, Kimihiko Ka ...

Session ID: 23a-E307-4
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2343

CONFERENCE PROCEEDINGS FREE ACCESS

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Simulation of CMOS circuit and single-electron transistors for readout of spin qubits

Tetsufumi Tanamoto, Keiji Ono

Session ID: 23a-E307-5
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2344

CONFERENCE PROCEEDINGS FREE ACCESS

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Reducing the effects of crosstalk in RF reflectometry by using mixed-mode transmission

Masato Machida, Raisei Mizokuchi, Jun Yoneda, Takashi Tomura, Tetsuo K ...

Session ID: 23a-E307-6
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2345

CONFERENCE PROCEEDINGS FREE ACCESS

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Evaluating Charge Noise Spectrum of pMOS Si Quantum Dots

Kazuma Nakagoe, Hiroki Takahashi, Raisei Mizokuchi, Jun Yoneda, Tetsuo ...

Session ID: 23a-E307-7
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2346

CONFERENCE PROCEEDINGS FREE ACCESS

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Non-equilibrium dynamics and charge noise in gate-controlled Si-MOS devices

Katsuya Sato, Satoru Miyamoto, Noritaka Usami

Session ID: 23a-E307-8
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2347

CONFERENCE PROCEEDINGS FREE ACCESS

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Enhancement of Tunneling Currents by Resonant States of SiGe Quantum Wells in Si-pn Junctions

Sanghun Cho, Kimihiko Kato, Shota Iizuka, Takahiro Mori, Takashi Nakay ...

Session ID: 23a-E307-9
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2348

CONFERENCE PROCEEDINGS FREE ACCESS

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Theoretical analysis on the effect of coupling between dopants and leads in Si nanodiodes for band-to-band tunneling enhancement

Chitra Pandy, Kensuke Yamaguchi, Yoichiro Neo, Hidenori Mimura, Daniel ...

Session ID: 23a-E307-10
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2349

CONFERENCE PROCEEDINGS FREE ACCESS

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A Study on improvement of output characteristics of tunnel FET with p-n-i-n structure

Riku Fujii, Koki Endo, Yan Wu, Yoshihiro Takahashi

Session ID: 23a-E307-11
Published: February 25, 2022
Released on J-STAGE: April 19, 2025

DOIhttps://doi.org/10.11470/jsapmeeting.2022.1.0_2350

CONFERENCE PROCEEDINGS FREE ACCESS

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