TiO
2 photocatalysts decompose hazardous chemical substances into CO
2 and H
2O under light irradiation. We formed the TiO
2 thin films on the quartz glass plates by RF magnetron sputtering method without heating. After 90-second UV irradiation, the thin films decompose colon bacillus down to 0.1%. Moreover, they absorbed visible light at over 600nm. We tried to pile up these semiconductor films, whose energy gaps are narrower than 3.2eV. TiO
2 thin films absorbed visible light more and caused more efficient photocatalytic reaction. Antibacterial catheters, contact lenses, plastic containers, etc., were prepared by the RF magnetron sputtering without heating.
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