The oxygen reduction is the cathode reaction in fuel cells and metal/air cells. The development of a new catalyst, which can efficiently progress the cathode reaction, is very important. In this study, Co, Co oxide, Pt and Pt oxide thin films prepared by reactive sputtering were characterized by XRD, XPS, EPMA and X-ray fluorescence analysis and their oxygen reduction activities in a KOH solution were investigated using rotating disk electrode method. CoO thin film could be prepared alone by sputtering Co target in Ar-50%O2 and 100%O2 gas, while Co (OH) 2 was found on the surface of the Co thin film obtained in 100%Ar by XPS analysis. On the other hand, Pt, PtO and PtO2 thin films were obtained by sputtering Pt target in 100%Ar, Ar-50%O2 and 100%O2, respectively. The oxygen reduction on the Co and Co oxide thin films was under mixed control of diffusion and charge transfer, and the charge transfer probably progressed by a 4 electron pathway. For both Co-and Pt-component system, the oxide thin films surpassed the metal one in the activity of oxygen reduction. Moreover, there was a similarity that the activity of the oxide thin film increased with increasing the oxygen/metal atomic ratio. However, it was confirmed that the oxygen reduction activity of the CoO thin film was too low to substitute for the noble metal catalyst.
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