We introduce an example of group IV semiconductor evaluation results by laser Raman spectroscopy.
Group IV semiconductors are attractive materials for electric integrated circuits, wearable devices, and
sensor devices in the societies of the Internet of Things. However, the group IV semiconductor device
process is gradually becoming too complex (miniaturization, low temperature, and so on) to achieve
high-performance devices. Laser Raman spectroscopy is a powerful process evaluation technique that
features the following advantages: speed, high-spatial resolution, and non-destructive measurements.
Since such physical properties as stress and crystal quality are found in the group IV semiconductors of
phonon energies (Raman spectra), they can be evaluated by measuring the Raman spectra. In this paper,
we report on large area measurements and evaluate the strain distribution in local regions by adding various
original improvements to a laser Raman spectrometer.
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