As a means for improving the iron loss in grain oriented silicon steel sheet, a TiN ceramic film was formed by CVD method on polished silicon steel sheet. The following results were obtained.
(1) The TiN ceramic film moderately increased the magnetic flux density
B8 (T) of the silicon steel sheet by 0.009–0.012 T, while the iron loss
W17⁄50 (W/kg) was dramatically improved by 0.11–0.23 W/kg. This improvement in iron loss is more marked in silicon steel sheet with a higher magnetic flux density. For example, in the silicon steel sheet products with
B8=1.93 T,
W17⁄50=0.89 W/kg, the final magnetic properties after magnetic domain refinement manifested an ultra-low iron loss of 0.57 W/kg, which corresponds to an improvement in iron loss of 36%.
(2) The improvement in iron loss when the TiN film was formed on a polished silicon steel sheet by the thermal CVD method was superior by 0.01–0.03 W/kg than that by plasma CVD.
(3) In a comparison between the results by the CVD and PVD methods, a similar degree improvement in iron loss by the PVD method (HCD) of 0.01–0.05 W/kg resulted than that by CVD.
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