Progress in Spin-on Hard Mask Materials for Advanced Lithography
公開日: 2014/09/13 |
27 巻
4 号
p. 503-509
Munirathna Padmanaban, JoonYeon Cho, Takanori Kudo, Dalil Rahman, Huirong Yao, Douglas McKenzie, Alberto Dioses, Salem Mullen, Elizabeth Wolfer, Kazuma Yamamoto, Yi Cao, YoungJun Her