Enhancing Hardness and Wear Performance of Diamond-Like Carbon Films through Substrate Cooling during HiPIMS Deposition
公開日: 2026/08/31 |
21 巻
3 号
p. 250-258
Yuuki Tokuta, Yasuyoshi Saito, Yoshikazu Teranishi, Taishi Uehara, Satoru Habuka, Ryo Sakamoto, Tetsuhide Shimizu