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  • 諏訪 佳子, 中 重治
    日本化学会誌(化学と工業化学)
    1974年 1974 巻 6 号 1019-1023
    発行日: 1974/06/10
    公開日: 2011/05/30
    ジャーナル フリー
    {Y3} [M 9vM2-y](M蹄Si)O112ザク石(M = Als←, Fes←, Ga争, y=O。0~2,0)のIRスペクトルを一測定した。固溶にともなうスペクトル変化からザクロ石構造中の孤立四面体,孤立八面体にそれぞれ局在するグループ振動の存在が認められた。
    MO4四面体の一下振動v3パソドはy=O. O is成ではいずれも3本に分裂し,縮退はすべてとけている。Alq四面体の3バンドはyの増如とともに低波数側にシフトし, y ,5組成から2本に縮退する。FeO4四面体のVsバンドはyが増加してもほとんどシフトしないが, y .5組成から2本に,5組成から1本に縮退する。GaO4四面体のsバンドe3 yの増加とともに,わずか低波数側にシフトし,y ,2組成から2本に, y, ,5組成から1本に縮退する。以上のことは聾四面体の伸縮振動が隣接陽イオンの静電場の強さに影響されること,およびFeO4 G典04四面体と他の配位陽イオンとの相互作用は,AIQ 4の場合より弱く,むしろ自由イオンに近い性質をもっていることを示している。
    固溶体のスペクトル変化から配位八面体の伸縮振動のバンドはAIO6では520,474,438 cm-i, FeO6 では382,362cm1, G06では466,400,342 cm備1, MgO6では400~350 cm"iのバンドと考える。
  • 諏訪 佳子, 中 重治, 野田 稲吉
    工業化学雑誌
    1971年 74 巻 5 号 845-848
    発行日: 1971/05/05
    公開日: 2011/09/02
    ジャーナル フリー
    {Y3}[MgyAl2-y](Al3-ySiy)O12ザクロ石(YAMG-1)のAl3+,{Y3-xMgx}[MgAl](Al2-xSi1+x)O12ザクロ石(YAMG-2)のMg2+の配位状態をそれぞれ,AlKα,MgKKα線のスペクトルシフトから検討した。シフトの測定には,金属アルミニウム,金属マグネシウムを標準として用いた。分光結晶,EDDT,ADPの温度変化を±0.3℃以下に制御した。YAMG-1において,6と4配位のAl3+の原子比が40:60であるy=0.0組成ザクロ石および原子比が14:86であるy=1.8組成ザクロ石のAlKα.波長シフト(Δ2θ)はそれぞれ,-0.087±0.005°,-0.072°±0.002°であった。その間の組成では,AlKαシフトはほぼ直線的に増加した。しかしAl3+が4配位位置のみを占めるはずであるy=2.0組成試料のAlKα,シフトは-0.071±0.0020であった。これらの結果は,y=2.0組成試料の6配位位置に若干のAl3+が残っており,この系のザクロ石の固溶限界がおよそy=1.8であることを示している。この値は格子定数変化から求めた値,y=1.7とほぼ一致する。YAMG-2ザクロ石試料のMgKαシフトは,スピネルについての4配位Mg2+による値(Δ2θ=-0.029°±0.005°)から,YAMG-2,x=0.0についての6配位Mg2+による値(-0.0480°±0.005°)をへて,紅ザクロ石についての8配位Mg2+による値(-0.084°±0.005°)まで引いた直線の上にのる。MgKα波長シフトの測定結果と,X線回折強度の計算値と実測値の比較の結果は,x≅0.6程度までMg2+はY3+を置換して8配位配置に入りうることを示している。
  • 諏訪 佳子, 中重 治, 野田 稲吉
    工業化学雑誌
    1970年 73 巻 9 号 1936-1940
    発行日: 1970/09/05
    公開日: 2011/09/02
    ジャーナル フリー
    {Y3-xMgx}[MgyAl2-y](Al3-(x+y)Six+y)O12(YAMG)系ザクロ石の固溶範囲とMg2+の配位選択性を検討した。Mg2+が8配位位置のY3+,または6配位位置のAl3+のみを置換する場合,単一相ザクロ石の生成範囲はそれぞれ,x<0.8,y<1.0であった。一方,Mg2+が8配位位置と6配位位置を同時に置換する場合,最大の置換量はx=O.6,y=1.0,すなわち,{Y2.4Mg0.6}[MgAl](Al1.4Si1.6)O12の組成を有し,格子定数はa0=12.008Åであった。Mg2+は一般にザクロ石構造中で,8配位位置より6配位位置をとり易いといわれている。しかしYAMG系ザクロ石の場合,Mg2+の6配位と8配位の選択性に顕著な差は見られなかった。これはMg2+の置換による構造中の配位多面体の歪への寄与は,Mg2+が8配位または6配位位置のみを占めるより,両位置を同時に占めた方がより少いためであろう。Mg2+の置換量が増えて単一相ザクロ石を生成し得ない領域では共存化合物は,配合組成の相違によって異り,xが増加すればスピネル,yが増加すれば,リン灰石型イットリウムマグネシウムケイ酸塩およびY2SiO5が共存し,それらの量は,いつれもxまたはyの増加とともに増加する。
  • 諏訪 佳子, 加藤 幸宏, 平野 眞一, 中 重治
    材料
    1982年 31 巻 349 号 955-959
    発行日: 1982/10/15
    公開日: 2009/06/03
    ジャーナル フリー
    The very fine oxide particles in TiO2-SnO2 system were prepared by the hydrolysis of titanium isopropoxide and tin isopropoxide in propanol solution. The following hydrolysis conditions were found to be necessary for the controlled synthesis of crystalline oxide precipitates, 1) process of water addition to propanol solution of metal isopropoxides, 2) the amount of water added to the metal isopropoxide solution, 3) hydrolysis time and aging time of the precipitate at boiling temperature (reflux time).
    The crystalline TiO2 of anatase structure was precipitated by the hydrolysis of 0.05mol/l titanium isopropoxide with the amount of water 300 times more of the equivalent value for the oxide formation and the subsequent reflux, while the decrease of the amount of water to 70 times of the equivalent value resulted in the formation of amorphous TiO2. The crystalline phase of the precipitate changed depending on the amount of SnO2 in the system. The precipitate of the composition Ti0.9Sn0.1O2 was the mixture of anatase and rutile phases with the particle size of 50Å, and the increase of SnO2 to x=0.2 in Ti1-xSnxO2 solid solution gave the oxide precipitate composed of only rutile phase with the particle size of 23∼25Å.
    On heating the precipitates, the grain of the anatase phase of TiO2 precipitates grew significantly at about 630°C, at which the phase transformation from anatase to rutile phase took place. On the precipitates of rutile structure, grain growth seemed to be more constrained and the neck growth between the grains became remarkable with an increase of the amount of SnO2.
  • 諏訪 佳子, 中 重治
    日本化学会誌(化学と工業化学)
    1972年 1972 巻 9 号 1643-1648
    発行日: 1972/09/10
    公開日: 2011/05/30
    ジャーナル フリー
    合成アルミ質ケイ酸塩ザクロ石[Mg3Al2Si3O12(Py),Mn3Al2Si3O12(Sp)]およびライム質ケイ酸塩ザクロ石[Ca3・Al2Si3O12(Gr),Ca3Fe2AlSi3O12(GA),Ca3Fe2Si3O12(An),Ca3Cr2Si3O12(Uv)]の赤外吸収スペクトルを測定した。
    1000~800cm-1の領域の強い吸収バンドは,PyとSpではA~Dの4本,GrとGAでは2本,AnとUvでは3本が観測された。天然ケイ酸塩ザクロ石ではつねに4本の吸収バンドが観測されている。
    因子群解析およびサイト群解析の結果から,B,C,Dの吸収バンドについて,B-(C+D)/2をSiO4四面体のVs振動のサイト群分裂と考え,SiO4四面体の共有綾と非共有稜の長さの差から求めた四面体ひずみとの関係を考察し0た。アルミ質ザクロ石からライム質ザクロ石のGrまで,四面体ひずみの減少とともに分裂の幅は減少するが,ライム質ザクロ石ではとくに相関関係は見られない。これは,四面体の振動は,6配位陽イオンよりも8配位陽イオンの格子振動と強くカップリングしていることを示唆する。A~Dスペクトルの形と四面体ひずみと分裂の幅との関係から,8配位陽イオンのイオン半径の小さいものほどカップリングは強く,四面体のひずみはGA,Gr,An,Uv,Sp,Al,Pyの順に増加すると推定された。
    SiO4四面体に関係すると考えられるA~Gの波数はアルミ質ザクロ石では8配位陽イオン,ライム質ザクロ石では6配位陽イオンのイオン半径の増加とともに減少する。
    八面体に関する吸収バンド(H,I)はつぎの領域に観測された。AlO6:480~450cm-1,FeO6:430~380cm-1,CrO6:450~410cm-1
  • 中 重治, 諏訪 佳子, 伊藤 祐敏
    工業化学雑誌
    1969年 72 巻 7 号 1480-1483
    発行日: 1969/07/05
    公開日: 2011/09/02
    ジャーナル フリー
    {Y3} [MgyGa3-y] (Ga2-ySiy)O12 系ザクロ石を合成し, {Y3} [MgyGa2-y] (M3+3-ySiy)O12 系ザクロ石 (M=Fe, Ga, Al) の生成過程および安定性を比較した。ザクロ石の生成過程において, YIMG (M=Fe ) では y=0.0~2.0にわたってYFeO3, Y2SiO5 が準安定相としてザクロ石と共存するが, 加熱処理の繰り返しによって単一相のザクロ石を得た。YAMG (M=Al) では y=0.0~1.7にわたって YAlO3, Y4Al2O9, Y2SiO5, リン灰石型化合物などが準安定相として生成されるが, y>1.7 では Y2SiO5 とリン灰石型化合物は安定相としてザクロ石と共存し, 加熱処理の繰り返しによってザクロ石単一相を得ることはできない。YGaMG (M=Ga)では y=0.0~1.0においてはザクロ石以外の複酸化物は生成されず, y=2.0において準安定相として Y2SiO5, リン灰石型化合物が生成されるが, 加熱処理の繰り返しによって比較的容易にザクロ石単一相を得た。このように Ga3+ イオンを含むザクロ石は Fe3+ イオン,Al3+ イオンを含むザクロ石より生成され易く, より安定である。これは Ga3+ イオンが Fe3+ イオン, Al3+ イオンより4配位位置を取り易いためと考えられる。YGaMG の y=2.0組成ザクロ石は格子定数 a0 =12.147±0.002Å,屈折率 n=1.820±0.05であった。
    三つの系のザクロ石の格子定数, 屈折率と組成yとの関係を示す直線は y=0.0から y=2.0に向って次第に互に接近し外挿すると一点に集中する。その点の組成は {Y3} [Mg2] (Mg0.5Si2.5)O12 に相当するが, 常圧下でこの組成のザクロ石を生成することはできなかった。この組成の推定格子定数および屈折率は, それぞれ α0=12.125Å, n=1.792 である。
  • 諏訪 佳子, 阪野 英夫, 水野 峰男, 齋藤 肇
    Journal of the Ceramic Society of Japan (日本セラミックス協会学術論文誌)
    1993年 101 巻 1174 号 659-664
    発行日: 1993/06/01
    公開日: 2010/08/06
    ジャーナル フリー
    Ca(OH)2 and H3PO4 were used as starting materials for synthesizing hydroxyapatite (HAp). When the stoichiometric amount of 1mol/l solution of H3PO4 was added dropwise to a Ca(OH)2 slurry in a N2 at-mosphere, pH of the slurry was shifted from 11.7 to 3.7, and resultant HAp became Ca-deficient. The Ca/P molar ratio of HAp was strongly affected by pH of the reaction slurry. Stoichiometric HAp(Ca/P=1.67) was prepared by keeping the slurry at pH=7.0 with a tris (hydroxymethyl) aminomethane solution (Tris buffer) and by aging for 48h at 60°Cin a N2 atmosphere. The Ca/P molar ratio of HAp was regulated by using Tris buffer to 1.66 under pH=6.0 and to 1.68 under pH=8.0, respectively. The stoichiometric HAp was stable up to 1300°C, and the lattice constants of the HAp calcined at 1100°C were a0=0.94185(2)nm and c0=0.68807(2)nm.
  • 固有X線の化学シフトとその応用(第1報)
    大野 勝美
    分析化学
    1969年 18 巻 8 号 986-991
    発行日: 1969/08/05
    公開日: 2009/06/30
    ジャーナル フリー
    けい光X線分析における重複の程度が著しい重複線を数学的に分離する方法として濃度パラメーターを導入した.従来重複線を数学的に分離する場合にはそれぞれの物質の固有X線スペクトルのピークの頂点にあたる分光角で重複線のX線強度を測定していた.
    本法は重複線のピークプロフィル全体の情報を利用し統計的手法を用いて濃度パラメーターを計算することにより重複線を精度よく分離することができる.
    この方法を用いてAl2O3-AlF3系のけい光X線分析を行なった結果,誤差は0.17%であった.
  • 諏訪 佳子, 杉本 良樹, 中 重治
    材料
    1975年 24 巻 262 号 627-631
    発行日: 1975/07/15
    公開日: 2009/08/20
    ジャーナル フリー
    The submicron samples of barium titanate were prepared by (1) the hydrolysis of titanium iso-propoxide in barium hydroxide solution (BT-I), (2) the simultaneous hydrolysis of barium iso-propoxide and titanium iso-propoxide (BT-II), and (3) the grinding of barium titanate prepared from barium carbonate and titanium oxide (BT-III) in iso-propyl alcohol or in air, and the species adsorbed on their surface were examined by means of TGA, DTA and IR spectroscopy.
    On the as-prepared BT-I having the particle size of 100 to 300Å, the surface species identified were the hydrogen-bonded hydroxyl group, iso-propyl or iso-propoxy groups, the carboxyl group and the carbonate ion. Adsorbed alcohol began to be removed at about 200°C and all species disappeared completely above 800°C.
    On the as-prepared BT-II having the particle size of about 100Å, the concentration of the iso-propoxy group and the carboxyl group seemed to be higher than those of as-prepared BT-I. Since the carbonate ion was not found on the as-prepared surface but appeared on heating it at 500°C, it is suggested that the carbonate ion would be formed from the carboxyl group.
    When the BT-III was ground in iso-propyl alcohol, its IR spectra were similar to those of the as-prepared BT-I, but when ground in air, the large broad doublet spectra appeared in the stretching vibration region of carbonate salt, suggesting the monodentate bonding of the carbonate ion on the barium ion site.
    The difference of the surface species and of the bonding character are considered to be related to the preparation method, the character of the surface ions, and the surface activity or the space charge layer near the surface of ferroelectric fine powder.
  • けい光スペクトルに与える生成条件と摩砕の効果
    早川 宗八郎, 長岡 輝治, 阿部 勝彦
    材料
    1974年 23 巻 250 号 531-535
    発行日: 1974/07/15
    公開日: 2009/06/03
    ジャーナル フリー
    The purpose of this work is to get some information on the correlation between the change in crystal structure of atomic long-range order and that in crystal field of short-range order during mechanochemical processes. The x-ray diffraction patterns and the fine structures of fluorescence spectra from doped Sm ions were observed on several TiO2 crystals which were prepared by various procedures. TiO2(Sm) of anatase type changed to that of rutile type by grinding. The fine structure of spectrum changed from anatase to rutile almost in parallel to the corresponding change in x-ray pattern. It shows that no essential difference exists between the long-range reordering and the short-range reordering during the mechanochemical phase change. The broadening of fine structures of spectra, however, was observed in neither well ground TiO2(Sm) nor amorphous TiO2 fired at temperatures lower than the crystallization temperature. Such amorphous phase of TiO2 is considered to have a definite crystal field due to the ionic surrounding having the short-range order. This seems quite different from usual inorganic glasses, which give fluorescence spectra with broad structures from doped Sm ions.
  • 諏訪 佳子, 杉本 良樹, 中 重治
    粉体および粉末冶金
    1978年 25 巻 5 号 164-167
    発行日: 1978/07/25
    公開日: 2009/05/22
    ジャーナル オープンアクセス
    The stability of several compounds in the system BaO-TiO2 coprecipitated from the alkoxides were investigated. The samples in which the mole ratios of BaO to TiO2 were 2/1, 1/1, 1/2, 1/3, 1/4, 2/9, 1/5 and 1/9 were prepared by the simultaneous hydrolysis of barium isopropoxide and titanium isopropoxide. On the as-prepared specimens, only 1/1 specimen crystallized as a single phase of cubic BaTiO3, 2/1 was composed of cubic BaTiO3 and Ba(OH)2·H2O, and all others in the TiO2-rich region were of amorphous forms. It is suggested that Ba2+ in the 1/1 solution reacts as a strong Lewis acid and directly combines with Ti(OiPr)62-, and a double alkoxide, Ba[Ti(OiPr)6] is formed in isopropanol solution. In the TiO2-rich region, the polymerization takes place on the formation of Ti-O-Ti bridge following the hydrolysis of Ti(OiPr)4, resulting in the precipitation of amorphous phase.
    By heating at 800°C of 1/2 and 1/5 specimens, the single phases of BaTi2O5 and BaTi5O11 were formed respectively. Thus far the single phases of these compounds have not been obtained. Since BaTi2O5 and BaTi5O11 begin to decompose above 1200°C, they are considered to be a low temperature form or a metastable form.
  • 林 卓, 佐藤 公彦
    粉体および粉末冶金
    1994年 41 巻 9 号 1099-1103
    発行日: 1994/09/15
    公開日: 2009/05/22
    ジャーナル オープンアクセス
    Barium titanate (BaTiO3) powders were prepared by hydrolysis of Ba-Ti bimetallic alkoxides containing octyl groups. The as-prepared BaTiO3 particles were amorphous in submicron size (-0.5μm). Crystalline BaTiO3 particles were obtained on preheating at 393K in a flow of oxygen/water vapor mixed gas and successive heating at 673K in oxygen atmosphere. The introduction of water vapor suppressed the formation of BaCO3, resulting in the formation of highly crystalline BaTiO3. The microstructure of BaTiO3 bodies sintered at 1573K exhibited grain sizes of 10-15 μm. They showed dielectric constant of about 2500 and the loss tangent of about 0.02 at the room temperature (1kHz).
  • 平野 眞一
    日本結晶学会誌
    1989年 31 巻 2 号 135-138
    発行日: 1989/03/30
    公開日: 2010/09/30
    ジャーナル フリー
  • 諏訪 佳子, 加藤 幸広, 平野 真一, 中 重治
    粉体および粉末冶金
    1981年 28 巻 1 号 28-32
    発行日: 1981/01/25
    公開日: 2009/12/04
    ジャーナル オープンアクセス
    LiTaO3 was prepared by hydrolyzing an ethanol solution of lithium ethoxide and tantalum ethoxide with H2O in N2 atmosphere. The samples with 25, 45, 46, ......, 54, 55 and 75 mole percent of Li2O (Li2O/Li2O+Ta2O5 mol%) were coprecipitated.
    The as-prepared samples with 45 to 55 mol% Li2O were amorphous, but crystallized to LiTaO3 byheating at 500°C for 2 h. Stability range of LiTaO3 solid solution phase below 1100°C could be determined from change of the lattice constants of LiTaO3 ss in 45 to 55 mol% samples heated at temperatures up to 1100°C. The ranges of LiTaO3 ss phase were 49.9 to 51.2 mol% at 800°C, 49.1 to 51.6 mol% at 950°C and 48.0 to 52.0 mol% at 1100°C. The lattice constants of stoichiometric LiTaO3 heated at 1100°C for 20 h were ac=5.153+0.001 A, and co=13.78+0.01 A.
    The as-prepared sample with 25 mol% Li2O was amorphous, and crystallized to LiTaO3 and fl-Ta2O5
    at 700°C. Above 800°C, LiTa3O8 was formed by the reaction of LiTaO3 with β-Ta2O5. A disordered NaCl type of Li3TaO4 was formed from the as-prepared sample with 75 mol% Li2O which changed to ordered tetragonal phase above 800°C.
  • 古川 義純
    日本結晶成長学会誌
    1994年 21 巻 5 号 523-524
    発行日: 1994/12/25
    公開日: 2017/05/31
    ジャーナル フリー
  • 中鉢 良治, 中塚 勝人, 下飯坂 潤三
    粉体および粉末冶金
    1976年 23 巻 6 号 211-215
    発行日: 1976/09/05
    公開日: 2009/05/22
    ジャーナル オープンアクセス
    Water base magnetic fluids were obtained by allowing anionic or nonionic surfactant to adsorb on the hydrophobic surface of magnetite colloid prepared by monomolecular adsorption of oleate. Sodium oleate, sodium dodecylbenzene sulfonate and polyoxyehtylene nonylphenyl ether (HLB=12) were used as a surfactant giving a double adsorption layer. In this paper, the influence of temperature and pH on the dispersion stability in water base magnetic fluids was investigated.
    The influence of electrolytes on the dispersion stability was less in the fluid obtained by the use of nonionic surfactant than in that obtained by anionic one. When the temperature was raised, the viscosity of the fluid obtained by the use of nonionic surfactant suddenly increased at the cloud point of the solution of the surfactant. As a result, it was found that the fluid obtained by the use of sodium dodecylbenzene sulfonate was fairly stable against the change in temperature and pH.
    Furthermore, it was found that when ethylene glycol was added to magnetic fluid, the freezing point of it was lowered, and simultaneously the evaporation of solvent was suppressed. Added amount of ethylene glycol over 60 vol% of magnetic fluid caused it to coagulate.
  • 含アルミニウム弗素リヒテライト組成結晶化ガラス中の結晶相
    田草川 信雄, 斎藤 肇
    窯業協會誌
    1972年 80 巻 926 号 380-387
    発行日: 1972/10/01
    公開日: 2010/04/30
    ジャーナル フリー
    Crystalline phases precipitated in glasses having the chemical composition of fluor-richterite containing aluminum-ion (Na⋅NaCa⋅Mg5-xAlx⋅AlxSi8-xO22F2, x=0-2.0) were studied by X-ray powder diffraction method, X-ray fluorescense spectroscopy and infrared absorption spectroscopy. The results obtained were summarized as follows.
    1) Three crystalline phases were identified as fluor-amphibole-I, fluor-amphibole-II and fluor-phlogopite.
    2) Fluor-amphibole-I precipitated in the glass where x=0.5, 1.0 or 1.5 had the structural unit of Na⋅NaCa⋅Mg5-XAlX⋅AlXSi8-XO22F2. The X-value, being very close to the x-value, increased with the x-value.
    3) Fluor-amphibole-II precipitated in the glass where x=2.0 had the structural unit of Na1-a⋅Na1-bCa1+c⋅Mg5-XAlX⋅AlXSi8-XO22F2. The X-value was smaller than the x-value. This composition was the intermediate one between fluor-richterite and fluor-tremorite.
    4) Fluor-phlogopite precipitated in the glass where x=1.0, 1.5 or 2.0 had the structural unit of Na1-aCa0.5a⋅Mg3⋅AlSi3O10F2. The a-value varied with the x-value.
    5) The coordination number of aluminum-ion in the crystalline phases were determined from the value of the chemical shift of the AlKαX-ray emission line.
    6) The relationship between the composition of fluor-amphibole-I and the wave number of infrared absorption peak associated with the Si-O symmetrical streching vibration was presented as the empirical formula.
  • 大坪 泰文, 関根 正裕
    日本レオロジー学会誌
    1992年 20 巻 2 号 51-55
    発行日: 1992/06/20
    公開日: 2012/11/20
    ジャーナル フリー
    Semiconducting tin dioxide particles were covered with insulating layer and its effect on electrorheological (ER) properties of the suspensions was examined under oscillatory and steady shear. When the particles were coated with titanium dioxide by hydrolyzing titanium tetraisopropoxide and heat-treated at 600°C, the suspension in a silicone oil showed a high yield stress at an electric field of 2.0 kV·mm-1. However, since the titanium dioxide layer was semiconducting, the current density was about 0.2 mA·cm-2 and would not be applicable to practical device. Using aluminium ion, the titanium dioxide can be doped from a semiconducting to an insulating state. The particles covered with surface layer consisting of titanium dioxide and aluminium oxide provided excellent ER fluids in water-free systems. The coating of semiconducting particles by hydrolysis of alkoxides is very useful for surface modification of particles to improve the ER performance of suspensions.
  • 稲垣 道夫, 中 重治
    材料
    1978年 27 巻 298 号 604-609
    発行日: 1978/07/15
    公開日: 2009/06/03
    ジャーナル フリー
  • 高橋 康隆, 和田 幸久
    窯業協會誌
    1987年 95 巻 1105 号 864-868
    発行日: 1987/09/01
    公開日: 2010/04/30
    ジャーナル フリー
    OMCVD of TiO2-SnO2 mixed films using titanium isopropoxide and tetrabutyltin as starting materials was investigated. In the temperature region between 500° and 550°C crystalline films with desired composition were obtained. Pure titania films had the anatase crystal form, but the doped ones with more than 25% SnO2 exhibited the rutile form. The size of crystallites in as-deposited films depended on the film composition and was found to be smallest near Ti/Sn ratio of 1:1. When the films were annealed at 1000°C over 50h, the crystalline size increased, however, its composition dependence was the same as that in as-deposited films. From this tendency and the composition dependence of lattice constants of the annealed films, it is concluded that the phase separation takes place through the spinodal decomposition during heat treatment. The as-deposited mixed films had no photo-conductivities but had moderate dark conductivities which strongly depended on the ambient gas components. Thus they are applicable to a basic material for gas sensors.
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