抄録
In this paper, we propose a high-accuracy spray coating method for obtaining the thick photoresist over 200μm. A multi-layered coating method with thin photoresist layers is applied in order to achieve a thick photoresist. We evaluated the waviness and the reproducibility of the thickness of the photoresist coated on a flat substrate. The multi-layered spray coating method with the edge cover achieves high accuracy thickness of the photoresist with covering wide-range of the target thickness.
