クリーンルーム内の非メタン炭化水素の発生量

抄録

In this paper we estimated the amount of non-methane hydrocarbon (NMHC) outgassed from a cleanroom by using a ventilation model. The estimated value for the amount of NMHC outgassed from an experimental cleanroom is in the range of 20 to 70ppmC・m^3/h in a steady state. The calculated NMHC concentration by ventilation model are consistent with the measured NMHC concentration in cleanroom air when outdoor air was introduced or a chemical filter was used under non-steady states. At an actual semiconductor manufacturing facilities, the estimated value for the amount of NMHC outgassed from the cleanroom is less than 5ppmC・m^3/h/m^2 when process equipments was stopped.