抄録
This study was conducted to establish the design method of air changes for a turbulent flow type cleanroom. The design method is to determine the air changes as the particle concentration limit of an objective cleanliness class meets a certain value of percent, such as 99 %, of the average particle concentrations measured at each sampling location which are produced by the value of the air changes, a constant particle generation rate, air flow distribution and so on in the cleanroom.
