抄録
Electrical characteristics and the electron density of the argon inductively coupled plasma (ICP) driven by high voltage pulse burst with 150 kHz-band at several pressures was evaluated based on a mutual induction model. The electrical parameters on an equivalent circuit of the mutual induction model of ICP were obtained from waveforms of coil current and voltage. The pressure was varied from 5 to 14 Pa. The frequency and the width of burst pulse voltage were 157 kHz and 200 μs, respectively, and its repetition rate was 1 Hz. When the input electric power into the ICP ranged from 2.7 to 11.9 kW, the coupling coefficient between the coil and plasma and the plasma impedance ranged from 0.66 to 0.70 and from 0.022 to 0.035 Ω, respectively. Assuming that the uniform cylindrical plasma was maintained at the burst pulse period, the electron density were estimated as 1019 m-3 with the effective electric field of the ranges from 75 to 132 V/m.
