Low Energy Ar+ Ion Scattering on InGaP(001) Surface

Karimov Mukhtorjon Karimberganovich; Kutliev Uchkun Otoboyevich; Ismailov Shavkat Ko'ziyevich; Otabaev Mekhroj Uchkun o'g'li

doi:10.1380/ejssnt.2020.164

Regular Papers

Low Energy Ar⁺ Ion Scattering on InGaP(001) Surface

Karimov Mukhtorjon Karimberganovich, Kutliev Uchkun Otoboyevich, Ismailov Shavkat Ko'ziyevich, Otabaev Mekhroj Uchkun o'g'li

著者情報

キーワード: Ion scattering, Energy and angular distributions, Computer simulation, Semichannel

ジャーナルオープンアクセス

2020 年 18 巻 p. 164-167

DOI https://doi.org/10.1380/ejssnt.2020.164

詳細

抄録

The energy and angular distributions of particles scattered Ar⁺ ions on the surface of InGaP(001)<110> have been calculated. The correlation between experimental and calculated angular distributions of the scattered particles has been presented. It has been shown that the semichanneled ions formed the characteristic peaks in the energy distributions of the scattered particles.

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