Linear Relationship between Reactive Gas Flow Rate and Target Power at Mode Transitions in Reactive Sputtering
公開日: 2024/04/04 |
論文ID 2024-013
Takeo Nakano, Kosuke Kimura, Yuto Iijima, Masato Takeuchi, Kei Oya, Masayoshi Nagao, Hisashi Ohsaki
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