2020 年 18 巻 p. 214-222
In the Internet of Things (IoT) era using Big Data, metrology is recognized as a crucial process that provides added value in hyper-scaling semiconductor manufacturing processes. Miniaturization of semiconductors requires the discussion of quantum theory on the order of tens of nanometers, and metrology (measurement technology) that supports this requirement has the potential of creating new research fields. Super-resolution optical technology is a common measurement technique that exceeds the physical limit. Moreover, advanced integrated metrology techniques, which include a combination of various kinds of metrology techniques coupled with artificial intelligence (AI) and machine learning (ML), have the potential to evolve into an untapped technological field required by the market. We conduct extensive discussions on the implications of AI/ML. A new way of advanced integrated metrology can be considered as an important role for the fabrication of next generation integrated circuit and be connected to value-added creation.