Development of Simple Display-type VD-WAAEL Analyzer

Abstract

We have realized a simple and compact new two-dimensional electron analyzer “a VD-WAAEL analyzer” using a variable-deceleration-ratio wide-acceptance-angle electrostatic lens (VD-WAAEL). Using an electron gun and an angle measurement tool, we confirmed that a two-dimensional angular distribution could be measured at once over a large solid angle of ±45°. We also confirmed that energy analysis could be performed with an aperture. Here a high energy resolution of ∼0.23% was obtained by using the aperture size of 0.8 mmø at the 40° position. Moreover, a magnified image of SUS316 #100 mesh was successfully measured. The magnification ratio was 25, which was in good agreement with the calculation.