Surface Phases and Processes on Si Surface

Victor G. Lifshits; Yury L. Gavrilyuk; Dmitry A. Tsukanov; Boris K. Churusov; Namjil Enebish; Svetlana V. Kuznetsova; Serguei V. Ryjkov; Dmitriy Gruznev; Chiei Tatsuyama

doi:10.1380/ejssnt.2004.56

Reviews

Surface Phases and Processes on Si Surface

Victor G. Lifshits, Yury L. Gavrilyuk, Dmitry A. Tsukanov, Boris K. Churusov, Namjil Enebish, Svetlana V. Kuznetsova, Serguei V. Ryjkov, Dmitriy Gruznev, Chiei Tatsuyama

著者情報

キーワード: Scanning tunneling microscopy, LEED, Auger electron spectroscopy, Surface thermodynamics (including phase transition), Surface diffusion, Surface electrical transport

ジャーナルフリー

2004 年 2 巻 p. 56-76

DOI https://doi.org/10.1380/ejssnt.2004.56

詳細

抄録

The general observations concerning the commonly accepted terms related to Si surface like 'surface', 'surface phase', 'adatoms', 'in phase' and 'on phase' atoms are given. Surface phases preparation, composition and their role in surface processes is examined. The influence of surface phases on processing as diffusion, desorption, codeposition, interface formation and surface conductivity is described. [DOI: 10.1380/ejssnt.2004.56]

責任著者(Corresponding author)

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