Study of palladium interaction with magnetron sputtered SnO₂ films

抄録

In this work we investigate the possibility to prepare Pd/SnO₂ systems by impregnating magnetron sputtered tin oxide layers with palladium using Pd(acac)₂ precursor. XRD studies show that as deposited layers are nano-crystalline exhibiting a lack of oxygen. The annealing in oxygen leads to the formation of polycrystalline nearly stoichiometric SnO₂ films. High resolution SEM shows that palladium deposition results in a formation of Pd nanosized particles interacting with the SnO₂ surface. XPS analysis proofs that strong metal-substrate interaction is responsible for a partial formation of the SnO surface phase even in the case of the oxygen annealed Pd/SnO₂ system. [DOI: 10.1380/ejssnt.2006.497]