抄録
We have observed the laser wavelength (1064, 532, 355 nm) and power (2, 10, 20 nJ per pulse) dependence of field evaporation of carbonaceous material on a tungsten needle by a three dimensional atom probe (3DAP). Carbonaceous materials were deposited by gallium focused ion beam-chemical vapor deposition. Several peaks corresponding to low mass carbon compounds were highest at 355 nm. On the other hand, predominant gallium peaks were observed with 20 nJ per pulse. These results indicate that incident photon energy and tip temperature rising should be taken into consideration when using a femtosecond pulsed-laser atom probe. [DOI: 10.1380/ejssnt.2010.217]
