In-Situ, Real Time Observation of Operating Condition of Multi Emitters in Pulse Mode

抄録

We have developed an electron optical instrument for evaluation of multi emitters. The instrument is a versatile emission microscope and is capable of operating as a secondary electron emission microscope (SEEM), a photo electron emission microscope (PEEM) and a field electron emission microscope (FEEM) imaging modes. The most important feature of the instrument is the capability of simultaneous observation of SEEM and FEEM images as well as PEEM and FEEM images in real time and in-situ mode. The operating condition of the multi emitters can be observed in DC mode as well as pulse mode. Thus, the instrument enables us to obtain quantitative knowledge as to the percentage of actually working emitters out of the whole emitters and to evaluate the stability of the emission current from each individual working emitter. [DOI: 10.1380/ejssnt.2010.266]