3A18 高プレチルト配向膜の方位角アンカリング強度の評価(物理・物性)

抄録

Nowadays, many kinds of alignemnt films which realize high pretilt angle are developed. Azimuthal anchoring strength is one of the important parameter of these films. This study focused on how anchoring strength and tilt angle are evaluated. First, using empty cell gap d, twist angle φ_t and tilt angle θ_P are obtained by fitting of the phase difference Δ and the angle of the amplitude ratio Ψ. To obtain real d, by using the normal and oblique incident measurement with an ellipsometer, φ_t, θ_P and real d are evaluated at the same time.