IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
LETTER
Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements
Katsuhiro SasakiMorimasa NishihiraKazuhiko Imano
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2004 Volume 1 Issue 15 Pages 472-476

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Abstract

To enhance the phase sensitivity of ultrasonic signals, phases of the multi-reference-wave are arranged around the maximum phase-sensitive region. The resolution of the phase detection is improved by magnifying the maximum sensitive phase detection outputs. A resolution of 40nm displacement (λ/200, 000) using 40kHz air-coupled ultrasonic waves has been achieved.

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© 2004 by The Institute of Electronics, Information and Communication Engineers
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