Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements

Katsuhiro Sasaki; Morimasa Nishihira; Kazuhiko Imano

doi:10.1587/elex.1.472

LETTER

Improved phase-detection method using an air-coupled ultrasonic wave for a few-tens of nanometers displacement measurements

Katsuhiro Sasaki, Morimasa Nishihira, Kazuhiko Imano

著者情報

キーワード: air-coupled ultrasonic wave, maximum phase-sensitivity, multi-reference-wave, phase-detection, nanometer order, displacement measurement

ジャーナルフリー

2004 年 1 巻 15 号 p. 472-476

DOI https://doi.org/10.1587/elex.1.472

詳細

抄録

To enhance the phase sensitivity of ultrasonic signals, phases of the multi-reference-wave are arranged around the maximum phase-sensitive region. The resolution of the phase detection is improved by magnifying the maximum sensitive phase detection outputs. A resolution of 40nm displacement (λ/200, 000) using 40kHz air-coupled ultrasonic waves has been achieved.

責任著者(Corresponding author)

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