TSV-based SIW bandpass filter with adjustable transmission zeros for D-band applications

Abstract

A substrate integrated waveguide (SIW) bandpass filter with adjustable out of band transmission zeros based on through-silicon via (TSV) technology is proposed. The single-cavity degenerate mode is separated by the metal via-hole and the defect grounding structure, which is coupled with other cavities to generate transmission zeros with adjustable positions and increase the out of band roll-off rate. The results show that, the center frequency of the filter is 148GHz, the bandwidth is 6.5GHz, the minimum insertion loss is 1.4dB, and the return loss is better than 20.4dB.