Sensor array characteristics of MOS Hall-plates and the comparison with split-drain MAGFETs

抄録

This paper describes magnetic sensor array characteristics of MOS Hall-plates and the comparison with split-drain MAGFETs. A problem of the magnetic sensor array is the offset deviation which is caused by process imperfection. To investigate the magnetic sensor array characteristics suitable for an array structure, a test chip integrating magnetic sensor arrays with different structures of MOS Hall-plates and split-drain MAGFETs are fabricated using 0.25µm standard CMOS process. The ratio of the sensor signal to offset deviation of the MOS Hall-plates is three times higher than that of the split-drain MAGFET. From the measurement results of MOS Hall-plates with different shapes, it is found that a Hall-plate with longer channel and probes located closer to the center of the channel has small offset deviation.