IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
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A high fill-factor comb-driven XY-stage with topological layer switch architecture
Kazuhiro TakahashiMakoto MitaHiroyuki FujitaHiroshi Toshiyoshi
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2006 Volume 3 Issue 9 Pages 197-202

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Abstract

We have developed novel device architecture of comb-driven double-gimbal XY-stage of high fill-factor (stage area / chip size), which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the Silicon-on-Insulator (SOI) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. Thanks to the new layered structures, the overall footprint of the actuator has been made small. The XY-stage moved 19µm in the X and the Y direction independently, and also in the diagonal direction.

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© 2006 by The Institute of Electronics, Information and Communication Engineers
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