Proposal of gain-matched VCSELs with a thermally actuated MEMS structure for wide temperature operations

抄録

We propose a novel gain-matched VCSEL with a thermally actuated cantilever structure, which enables the lasing wavelength to be matched with a gain-peak wavelength even under wide temperature changes. The proposed structure includes an Al_xO_y layer in an air-gap cavity, which results in the increase of the temperature dependence of lasing wavelengths. The modeling result shows a potential of wide temperature operations of over 200K.