IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
Improved near-infrared sensitivity of a back-side illuminated image sensor with a metal reflector
Tetsuya AriyoshiShozo MoritaAkiyoshi BabaYutaka Arima
Author information

2009 Volume 6 Issue 6 Pages 341-346


To improve the near-infrared sensitivity of an image sensor that has a conventional pixel structure, we made use of the metal wiring layer as a reflector in addition to the method of back-side illumination from the etched back surface of the sensor. We fabricated an image sensor that has a remaining silicon substrate thickness of 32 ± 4µm and evaluated the spectral sensitivity. For 830nm light, the sensitivity is about the same as for front-side illumination. For a wavelength of 970nm, the sensitivity was 2.2 times as high as for front-side illumination. The image sensor with reflector has about 30% higher sensitivity than without the reflector.

Content from these authors
© 2009 by The Institute of Electronics, Information and Communication Engineers
Previous article Next article