IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
LETTER
Characterization of a MEMS resonator with extended hysteresis
Suketu NaikTakashi Hikihara
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2011 Volume 8 Issue 5 Pages 291-298

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Abstract

In this paper an electrostatically driven MEMS resonator with resonance and hysteresis characteristics is reported. The resonator begins to exhibit spring-hardening effect at ac excitation voltage of 105mV and dc bias voltage of 5V in vacuum at 50Pa. An extended hysteresis at low pressure and high excitation voltage during upsweep and downsweep of excitation frequency was observed. This characteristic facilitates the usage of this type of resonator in a range of applications such as a cascaded filter array or as a high bandwidth resonator.

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© 2011 by The Institute of Electronics, Information and Communication Engineers
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