IEICE Electronics Express
Online ISSN : 1349-2543
ISSN-L : 1349-2543
Low actuation-voltage shift in MEMS switch using ramp dual-pulse
Majid ZarghamiYasser MafinejadAbbas KouzaniKhalil Mafinezhad
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2012 Volume 9 Issue 12 Pages 1062-1068


This paper proposes a ramp dual-pulse actuation-voltage waveform that reduces actuation-voltage shift in capacitive microelectromechanical system (MEMS) switches. The proposed waveform as well as two reported waveforms (dual pulse, and novel dual-pulse) are analyzed using equivalent-circuit and equation models. Based on the analysis outcome, the paper provides a clear understanding of trapped charge density in the dielectric. The results show that the proposed actuation-voltage waveform successfully reduces trapped charge and increases lifetime due to lowering of actuation-voltage shift. Using the proposed actuation-voltage waveform, the membrane reaches a steady state on the electrode faster.

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© 2012 by The Institute of Electronics, Information and Communication Engineers
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