High-Q SWCPL for CMOS millimeter-wave technology

Abstract

In this paper, slow wave coplanar waveguide transmission line (SWCPL) is proposed on patterned ground shields in 0.18µm CMOS technology for low-loss passive devices, components and interconnects in millimeter wave region. Patterned grounds act to produce the slow-wave effect and they are usually kept below the metallization plane to reduce dielectric loss of the lossy silicon substrates. The measured attenuation loss and phase constant of the proposed CPW are 0.619dB/mm and 2.574rad/mm, respectively which result in the Quality factor (Q-factor) to be 18 at 54GHz.