Cavity-resonator-integrated guided-mode resonance filter in channel waveguide

Junichi Inoue; Tomonori Ogura; Koji Hatanaka; Kenji Kintaka; Kenzo Nishio; Yasuhiro Awatsuji; Shogo Ura

doi:10.1587/elex.10.20130444

This article has now been updated. Please use the final version.

Cavity-resonator-integrated guided-mode resonance filter in channel waveguide

Junichi Inoue, Tomonori Ogura, Koji Hatanaka, Kenji Kintaka, Kenzo Nishio, Yasuhiro Awatsuji, Shogo Ura

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Keywords: Wavelength filters, optical waveguides, grating couplers, guided-mode resonance, distributed Bragg reflectors, waveguide resonators

JOURNAL FREE ACCESS Advance online publication

Article ID: 10.20130444

DOI https://doi.org/10.1587/elex.10.20130444

The final version of this article is now available: Vol. 10 (2013), No. 15 p. 20130444

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Abstract

A cavity-resonator-integrated guided-mode resonance filter (CRIGF) consisting of a grating coupler and a pair of distributed Bragg reflectors in a channel waveguide is proposed for a narrow-band reflection spectrum with a small aperture. A channel waveguide structure and grating pattern of the device were simultaneously formed by the electron-beam direct-writing lithography. A full-width at half-maximum of reflection spectrum of the fabricated CRIGF was about 0.3 nm with the maximum reflectance of about 30%. A reflection phase varied by almost 2π for wavelength change of 1 nm.

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