A CMOS-MEMS Cantilever Sensor for Capnometric Applications

Asif Mirza; Nor H. Hamid; Mohd. H. Md. Khir; John O. Dennis; Khalid Ashraf; Muhammad Shoaib; Mohammad Tariq Jan

doi:10.1587/elex.11.20140113

This article has now been updated. Please use the final version.

A CMOS-MEMS Cantilever Sensor for Capnometric Applications

Asif Mirza , Nor H. Hamid, Mohd. H. Md. Khir, John O. Dennis, Khalid Ashraf, Muhammad Shoaib, Mohammad Tariq Jan

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Keywords: Capnometers, CMOS-MEMS, CO₂ sensor, quality factor, microcantilever

JOURNAL FREE ACCESS Advance online publication

Article ID: 11.20140113

DOI https://doi.org/10.1587/elex.11.20140113

The final version of this article is now available: Vol. 11 (2014), No. 9 pp. 20140113-20140113

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Abstract

Capnometers monitor the concentration of CO₂ in exhaled breath, which can be a life saving modality. High cost, big size and high power consumption of the conventional capnometers limit their scope and adaption. To overcome these issues, a CMOS MEMS microcantilever based CO₂ sensor is proposed for capnometric applications. The microcantilever is manufactured using CMOS MEMS technology and its critical parameters are analytically investigated. The optimized microcantilever has a quality factor, sensitivity and resolution of 3116, 16 mHz/ppm and 0.31 ppb, respectively.

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