Abstract
This paper presents a coplanar waveguide (CPW) method to extract the permittivity of dielectric materials. The extraction is implemented by specifying an estimated permittivity and then calibrating it repeatedly. The calibrating process lies on matching the simulated and measured propagation-constants, i.e., narrowing their difference until it is less than 1%. A single variable strategy is also proposed to accelerate the calibration. Compared with the transmission-line method, our method shows good agreement over a broad frequency range for silicon substrate, while it is easier to be implemented.
