2015 年 25 巻 2 号 p. 126-130
Multilayer mirror is very useful reflective device for slow neutron experiments. Recently, we succeeded in fabrication of large size neutron supermirror with high reflectivity using ion beam sputtering system (KUR-IBS) and of all neutron supermirrors in two neutron guide tubes at BL06 at J-PARC MLF. We also realized large size flexible self-standing m=5 NiC/Ti supermirror. In this paper, we overview the performance and utility of neutron multilayer mirrors fabricated with the KUR-IBS.