研究論文
反応性スパッタ法で作製したZr酸窒化物の酸素還元触媒能
2008 年 33 巻 2 号 p. 38-45
詳細
2008 年 33 巻 2 号 p. 38-45
Zirconium-based compounds prepared by an R.F. reactive sputtering method using Zr target under Ar+02+N2 atmosphere with heating a substrate were evaluated as a non-platinum cathode for polymer electrolyte fuel cells. The effect of the substrate temperature and the gas atmosphere during the film formation on the catalytic activity for the oxygen reduction reaction (ORR) and the characteristics of the films were investigated. The catalytic activity for the ORR increased with the increasing substrate temperature. The ZrOxNy prepared at PAr=0.886 Pa, PN2=0.41Pa, and PO2=1.7m Pa with a substrate temperature of 800°C had a superior catalytic activity for the ORR. The onset potential for the ORR had a maximum of 0.8 V vs. RHE. Thin film XRD analysis revealed that the ZrOxNy with a high catalytic activity for the ORR contained the Zr2ON2 crystalline structure.
