抄録
In developing an automation in processes, a demand for compact and simple distance measurement is increasing. A compact distance meter based on self-coupling effect of semiconductor laser has been studied. It is a compact and simple sensor with high accuracy as it consists of only a laser and a lens. However, a measurement error of this distance meter increases due to mode hop of FP type semiconductor laser. In this paper, a distance meter based on self-coupling effect using VCSEL is studied. It is confirmed that the mode hop for VCSEL does not happen and the distance meter using VCSEL can measure a distance. Furthermore, the distance meter using VCSEL with less optical output power can measure longer distance than that using FP laser.
