シンクロトロン光励起プロセスの半導体応用と展望

抄録

Synchrotron light-excited process is one of the promising techniques for future semiconductor processes. In this report, we introduce several examples of the application of the synchrotron light-excited process on the semiconductor development, and focus especially on the growth and etching of II-VI compound semiconductor. In addition, the outline of a beamline for the development of advanced materials and processing at Saga Light Source is reported as a future perspective of the synchrotron light-excited process.