La_0.5Sr_0.5CoO₃の放電カソード材料としての電気特性

抄録

The La_0.5Sr_0.5CoO₃ was used as a cathode for the first time when the plasma display panel was used on the handheld personal computer. It has favorable sputtering resistance characteristic and stable discharge characteristic in gases. In this report, the electrical characteristics of the La_0.5Sr_0.5CoO₃ was investigated through an analysis of the DC plasma panel which was made as prototype. The dimensions of the test plasma panel were measured exactly by the end-measuring machine, and its electric properties were estimated. On the analysis of the DC plasma panel, LaB₆ and metal Ni cathode were investigated in the same way, and the comparative analysis was carried out. From the analysis in sputtering experiment that was conducted in the AC-type sputtering apparatus, the sputter rate of La_0.5Sr_0.5CoO₃ is greater than the LaB₆'s one, while the sputter rate of La_0.5Sr_0.5CoO₃ that is used as a cathode, is smaller than others. The La_0.5Sr_0.5CoO₃ has larger secondary-emission coefficient γ than LaB₆ or metal Ni. It was presumed that La_0.5Sr_0.5CoO₃'s larger secondary-emission coefficient γ reduce the sputter rate when it is used as a cathode.