抄録
A surface acoustic wave (SAW) is perturbed from physical and/or chemical changes of an adjacent medium. If a liquid-phase sensor is realized, a shear horizontal SAW (SH-SAW) must be used. The SH-SAW sensors been investigated since 1987. Measuring objects of the SH-SAW sensor are not only immunoreactions but also liquid properties. Feature of the SH-SAW sensor is simultaneous detection of mechanical and electrical properties of liquid. In this paper, first, theory of the SH-SAW sensor is described. Then experimental results using the SH-SAW sensor on 36YX-LiTaO3 are introduced. Also, the sensor sensitivities of the SH-SAW sensors which are fabricated on piezoelectric substrates are theoretically compared.
