電気学会論文誌C(電子・情報・システム部門誌)
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<電子物性・デバイス>
LiTaO3基板上の漏洩弾性表面波の特性改善
木村 哲也門田 道雄伊田 康之
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2011 年 131 巻 6 号 p. 1115-1119

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A Leaky surface acoustic wave (LSAW) on Al-electrodes/36-48°YX-LiTaO3 substrates have widely used as filters and duplexers in cell phones because of having a suitable electro-mechanical coupling factor, reflection coefficient and good Q-factor for cell phones. In this paper, a new LSAW structure consisted of upper Al-electrodes stacked on lower grooved Cu-electrodes in the LiTaO3 is proposed and compared with Al-electrodes (0.1λ)/42°YX-LiTaO3 which has been considered the best structure ever. As the result, authors have been able to improve characteristics of the LSAW.
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© 電気学会 2011
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