抄録
Quartz has been widely used for resonators and filters because of its excellent electromechanical characteristics. Quartz has a transition temperature, TC, at 573°C. The electromechanical characteristics of quartz have been well investigated for α-phase (below TC), however the characteristics in β-phase have not been well clarified. We investigated the piezoelectric properties of β-quartz plates from 573°C to about 1,300°C. Clear piezoelectric resonances with high quality factors were observed. By using the large frequency temperature coefficient, β-phase quartz can be applicable to temperature sensors in high temperature region above 600°C. We proposed also an unwired set-up using the β-phase quartz temperature sensor.
