抄録
This paper presents the locomotion control of micro electro mechanical systems (MEMS) micro robot. MEMS micro robot demonstrates the locomotion control by the pulse-type hardware neural networks (P-HNN). P-HNN generates oscillatory patterns of electrical activity such as living organisms. The basic component of P-HNN is pulse-type hardware neuron model (P-HNM). P-HNM has same basic features of biological neurons such as threshold, refractory period, spatio-temporal summation characteristics and enables the generation of continuous action potentials. P-HNN was constructed by MOSFETs, can be integrated by CMOS technology. Same as the living organisms P-HNN realized the robot control without using software programs, or A/D converters. The size of micro robot fabricated by the MEMS technology was 4×4×3.5 [mm]. The frame of robot was made of silicon wafer, equipped with rotary type actuators, link mechanisms and 6 legs. MEMS micro robot emulated the locomotion method and the neural networks of the insect by rotary actuators, link mechanisms and P-HNN. As a result, we show that P-HNN can control the forward and backward locomotion of fabricated MEMS micro robot, and also switched the direction by inputting the external trigger pulse. The locomotion speed was 19.5 [mm/min] and the step width was 1.3 [mm].
