2017 年 137 巻 2 号 p. 273-278
This paper considers the positioning of a pneumatic stage. To achieve high precision positioning under different length of pipe, which connects servo valves and cylinders, a pneumatic system is divided into two subsystems. In this situation, model following control (MFC) is employed so as to compensate effects of unknown parameter of the pneumatic system. Experiments demonstrate that, by using the MFC, the repeatability of positioning is improved.
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