Laser SpeckleのためのUV光を用いた鏡面測定

抄録

A non mechanical scanning method is developed for mapping absolute vibrational patterns of a polishing surface piezoelectric device. In this paper, by improving the traditional Laser Speckle method, we first proved the method can measure the polished scattered light of the smooth surfaces. As a result, using 377nm of an ultraviolet laser device, the simulation of the polished surface was carried out to 45 from 10 degrees, and, moreover, the reflection coefficients found area of 35% or less by the measurements.