電気学会論文誌C(電子・情報・システム部門誌)
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
<光工学>
分光エリプソメータによるパラフィン薄膜の解析
熊谷 寛飯田 里帆小菅 智裕佐藤 崇信鈴木 道夫石川 春樹
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2021 年 141 巻 4 号 p. 572-573

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Optical constants and thin film structures of paraffin thin films were analyzed by a spectroscopic ellipsometer. As a result, it was found that the film thickness and the structure changed depending on the film forming temperature. In this experiment, the film thickness was thicker at low temperature and thinner at higher temperature. It is considered that this is because the melting point of paraffin was about 65 degrees, and therefore, when the paraffin was applied to the substrate at a low temperature by the roller, there was a part that was not completely melted, and it was thought that the paraffin was deposited thickly.

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