電気学会論文誌C(電子・情報・システム部門誌)
Online ISSN : 1348-8155
Print ISSN : 0385-4221
ISSN-L : 0385-4221
電着ポリイミドを誘電体とした固定コンデンサ
橋詰 賢一山本 秀雄伊佐 功絹田 幸生石川 勇久米 信行吉野 勝美
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1992 年 112 巻 12 号 p. 828-834

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Polyamic acid thin film was electrodeposited on metal foil using the solution containing triethyl-ammonium salt of polyamic acid dissolved in mixed solvent of DMF and methanol. The polyamic acid thin film was continuously imidized to form polyimide dielectric thin film, on which polypyrrole was polymerized as another electrode. Characteristics of this polyimide thin film as a dielectric is similar to that of polyimide film formed by spin coating technique. Applying this method to etched aluminium foil, small size film capacitor which has large capacitance and excellent characteristics was proposed.
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